Electrical & Computer Engineering
College of Science and Engineering
Twin Cities
Award Year
2019
University Award
Distinguished McKnight University Professors
Section A
, Location 14
Miniaturization of nanostructures toward the atomic scale
Sang-Hyun Oh's group invented a new technique called atomic layer lithography capable of generating features as small as one nanometer, exceeding the resolution limit of state-of-the-art manufacturing technologies by more than an order of magnitude. Other conventional techniques cannot mass-produce such small and uniform gaps. The resulting structures are essential building blocks for electronic, optical devices, and biosensors, thus these methods have been widely adopted by many researchers world-wide to perform experiments in previously inaccessible regimes.